Display

ABSTRACT

A display includes: a laminated wiring with a conductive film arranged on a foundation layer, and a transparent film and a translucent film arranged on the conductive film; a wiring terminal part arranged at an edge portion of the laminated wiring and having the same laminated structure as that of the laminated wiring; and an insulating film that covers the laminated wiring and the wiring terminal part.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.14/046,782, filed Oct. 4, 2013, which claims priority from JapanesePatent Application No. 2012-226843, filed Oct. 12, 2012, the entirecontents of which all are incorporated herein by reference.

FIELD OF THE INVENTION

The present invention relates to a display, and more specifically, to adisplay suitable for outdoor use.

BACKGROUND ART

A display to be used outdoors is required to achieve favorable displaycharacteristics, even if it is used in an environment such as that insunlight where the display receives a large amount of incident lightfrom outside the display. Meanwhile, a wiring of the display is requiredto achieve a low resistance and required to be processed easily. Analuminum (Al) alloy responsive to these requirements has been used inmany cases as a metal to form the wiring.

However, an aluminum alloy has a high reflectance. Hence, if the displayis used in an environment where the display receives a large amount ofincident light from outside the display, the incident light reflects offa wiring made of the aluminum alloy, failing to achieve favorabledisplay characteristics.

In response, provision of an antireflection film on the aluminum alloywiring has been considered with the intention of reducing reflection oflight to enter the display from a display surface. As an example,Japanese Patent Application Laid-Open No. 2010-79240 discloses anantireflection film composed of an aluminum film and an aluminum nitridefilm.

Japanese Patent Application Laid-Open No. 2007-123672 discloses aconductor structure including an aluminum alloy film containing nickeland nitrogen as an upper film.

As described above, if the wiring is composed of a conductive film suchas an aluminum alloy film, incident light reflects off a surface of theconductive film due to a high reflectance on the surface of theconductive film, failing to achieve favorable display characteristics.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a display thatachieves excellent visibility of a display image even if the display isused outdoors.

According to an aspect of the present invention, the display includes: alaminated wiring with a conductive film arranged on a foundation layer,and a transparent film and a translucent film arranged on the conductivefilm; a wiring terminal part arranged at an edge portion of thelaminated wiring and having a laminated structure being the same as atleast that of the laminated wiring; and an insulating film that coversthe laminated wiring and at least the wiring terminal part.

The aforementioned display includes the laminated wiring and the wiringterminal part each including the translucent film and the transparentfilm laminated on the conductive film. This suppresses reflection oflight from a surface of the conductive film, thereby obtaining a displaywith excellent visibility.

These and other objects, features, aspects and advantages of the presentinvention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view showing the structure of a touch panel of adisplay according to the present invention;

FIG. 2 is a sectional view of the display according to the presentinvention;

FIG. 3 shows an example of an array substrate;

FIG. 4 is a sectional view showing the structure of a touch panelaccording to a first preferred embodiment of the preset invention;

FIGS. 5 to 7 each show an example of a film pattern composed of alight-shielding part, a transmitting part and the like as a pattern fora translucent film;

FIG. 8 is a sectional view showing a translucent film having a filmpattern composed of a light-shielding part and a transmitting part;

FIGS. 9 and 10 are sectional views each showing a translucent filmhaving a film pattern composed of a light-shielding part and atranslucent part;

FIGS. 11 and 12 each show the structure in cross section of a terminalpart of the touch panel;

FIGS. 13 to 22 are sectional views each showing a step of manufacturingthe touch panel according to the first preferred embodiment of thepresent invention;

FIGS. 23A to 23D each show a step of assembling the display;

FIGS. 24 to 33 are sectional views each showing a step of manufacturinga touch panel according to a second preferred embodiment of the presentinvention;

FIGS. 34 and 35 are sectional views each showing the structure of atouch panel according to a third preferred embodiment of the presetinvention;

FIG. 36 is a sectional view showing the structure of a touch panelaccording to a fourth preferred embodiment of the present invention;

FIGS. 37 to 39 are sectional views each showing the structure of a touchpanel according to a fifth preferred embodiment of the preset invention;

FIGS. 40 to 45 are sectional views each showing a step of manufacturingthe touch panel according to the fifth preferred embodiment of thepresent invention; and

FIGS. 46 and 47 are sectional views each showing the structure of thetouch panel according to the fifth preferred embodiment of the presetinvention.

EMBODIMENT FOR CARRYING OUT THE INVENTION

<Overall Structure of Display>

FIG. 1 is a plan view showing a touch panel part of a display 100according to the present invention. FIG. 2 is a sectional view of thedisplay 100 taken along line A-A of the touch panel of FIG. 1.

The display 100 shown in FIGS. 1 and 2 is configured to allow input onthe touch panel on the assumption that the display 100 is used outdoors,and has a pointing function realized with a finger, for example.

As shown in FIG. 2, the display 100 includes a display module 11 such asa liquid crystal display, a touch panel 12 arranged on a display surfaceof the display module 11, protection glass 13 that protects a surface ofthe touch panel 12 for example from a scratch, and a casing 14 thathouses the display module 11, the touch panel 12, and the protectionglass 13. If used in combination with a display module to form a GUI(graphical user interface) unit, the touch panel 12 can provide thedisplay 100 with a pointing function.

The touch panel 12 is a projected capacitive touch panel. The touchpanel 12 has a matrix pattern with X position detecting wirings 2arranged so as to extend in a column direction (Y direction of FIG. 1),and Y position detecting wirings 3 arranged above the X positiondetecting wirings 2 so as to extend in a row direction (X direction ofFIG. 1) and to cross the X position detecting wirings 2 in a gradeseparated manner. The X and Y position detecting wirings 2 and 3 arearranged on a transparent substrate made of glass or PET (polyethyleneterephthalate), for example.

As shown in FIG. 1, the X and Y position detecting wirings 2 and 3 areelectrically connected via lead wirings 4 to a terminal part 5 providedat an edge portion of the touch panel 12 for input and output of asignal to and from the outside. The touch panel 12 is electricallyconnected through the terminal part 5 to a control substrate and thelike not shown in the drawings.

In preferred embodiments described later, the X position detectingwirings 2 are described as lower wirings (wirings close to thetransparent substrate), and the Y position detecting wirings 3 aredescribed as upper wirings. The X and Y position detecting wirings 2 and3 may be reversed in terms of their relative vertical positions.

The touch panel 12 includes post-process recognition marks M1, FPCalignment marks M2, and a panel identification mark (panel ID) 6 and thelike formed at respective positions of the touch panel 12. Morespecifically, in the example of FIG. 1, the post-process recognitionmarks M1 are formed at two upper corners in the Y direction of the touchpanel 12, the FPC alignment marks M2 are formed at positions nearopposite ends of the terminal part 5 extending in the X direction, andthe panel ID 6 is formed at a lower edge portion in the Y direction ofthe touch panel 12.

The post-process recognition marks M1 are used in a step performed afterthe X and Y position detecting wirings 2 and 3 are formed. The FPCalignment marks M2 are used in aligning an FPC (flexible printedcircuit) and the terminal part 5 when the FPC and the terminal part 5are connected. The panel ID 6 is used for identification of the touchpanel 12.

Regarding manufacture of touch panels or liquid crystal panels, multiplepanels are formed in an array on one mother substrate, and these panelsare subjected to the same step simultaneously. After a certain step isfinished, the mother substrate is divided into the individual panels.

The aforementioned mother substrate on which multiple panels arearranged is called an array substrate. During a step performed on thearray substrate, a panel is identified by a panel ID, and the arraysubstrate is identified by a sheet ID given at any position of the arraysubstrate.

FIG. 3 shows an example of the array substrate. In the example of FIG.3, six touch panels 12 are formed on one mother substrate MB, with threetouch panels 12 aligned in the Y direction and two touch panels 12aligned in the X direction. The mother substrate MB includes, inaddition to a sheet ID 7, alignment marks M3 and cutting marks M4 formedat respective positions of the mother substrate MB. The alignment marksM3 are used in photolithography process to be performed when an upperwiring pattern is laid on a lower wiring pattern, and inphotolithography process to be performed when a terminal opening patternis aligned with the lower and upper wiring patterns. The cutting marksM4 are used in dividing the mother substrate MB by cutting into theindividual touch panels 12. More specifically, in the example of FIG. 3,the cutting marks M4 are formed at four corners of the mother substrateMB, the alignment marks M3 are formed near the four cutting marks M4,and the sheet ID 7 is formed near a cutting mark M4 at an edge portionin the X direction of the mother substrate MB and at a bottom portion inthe Y direction of the mother substrate MB.

First Preferred Embodiment

A first preferred embodiment of the present invention is described nextby referring to the structure in cross section of the touch panel 12.FIG. 4 shows the structure in cross section of the touch panel 12 takenalong line B-B of FIG. 1.

As shown in FIG. 4, the touch panel 12 includes a transparent substrate20 (corresponding to a mother substrate) made for example of glass orPET, a lower wiring 30 arranged on the transparent substrate 20, and aninterlayer insulating film 21 arranged so as to cover the lower wiring30. The lower wiring 30 is a laminated wiring composed of a conductivefilm 31, a transparent film 32, and a translucent film 33 laminated inthis order. The lower wiring 30 corresponds to the X position detectingwiring 2 shown in FIG. 1. The transparent substrate 20 functions as afoundation for forming the lower wiring 30, so that it is also called afoundation layer in some cases.

An upper wiring 40 is arranged on the interlayer insulating film 21. Theupper wiring 40 is a laminated wiring composed of a conductive film 41,a transparent film 42, and a translucent film 43 laminated in thisorder. A protection insulating film 22 is arranged so as to cover theupper wiring 40. The upper wiring 40 corresponds to the Y positiondetecting wiring 3 shown in FIG. 1. The interlayer insulating film 21functions as a foundation for forming the upper wiring 40, so that it isalso called a foundation layer in some cases.

The conductive film 31 is made of an Al-based alloy such as AlNiNd as alow-resistance material and has a thickness of 300 nm, for example.

The transparent film 32 is composed of an IZO (indium zinc oxide) filmand has a thickness of 50 nm, for example. The translucent film 33 iscomposed of an Mo (molybdenum) film and has a thickness of 5 nm, forexample. The interlayer insulating film 21 is composed of a siliconoxide (SiO₂) film and has a thickness of 600 nm, for example.

The conductive film 41 is made of an Al-based alloy such as AlNiNd as alow-resistance material and has a thickness of 400 nm, for example. Thetransparent film 42 is composed of an IZO film and has a thickness of 50nm, for example. The translucent film 43 is composed of an Mo film andhas a thickness of 5 nm, for example. The protection insulating film 22is composed of a silicon oxide film and has a thickness of 300 nm, forexample.

The conductive films 31 and 41 are made of a material having an averagereflectance of 50% or more in a visible light region (from 380 nm to 780nm) and a resistivity of 20 μΩcm or less at room temperature. Thelow-resistance material mentioned herein means a material having aresistivity of 10 μΩcm or less.

The conductive films 31 and 41 are each described as being made ofAlNiNd in the aforementioned example. Each of the conductive films 31and 41 may also be a laminated film of Al and a different Al-basedalloy, a laminated film of Ag and an Ag-based alloy, a laminated film ofCu and a Cu-based alloy, a laminated film of Cr (chromium) and anAl-based alloy, or a laminated film of Mo and an Al-based alloy.

The transparent films 32 and 42 are each composed of a film having atransmittance of 70% or more in a visible light region.

The transparent films 32 and 42 are each described as a transparent filmcomposed of an IZO film and having a thickness of 50 nm. Such atransparent film is not the only example of the transparent films 32 and42. Any transparent film adjusted so as to achieve an optical pathlength of from 0.09 to 0.14 μm can reduce reflection of light from theconductive films 31 and 41. The aforementioned adjustment of the opticalpath length can be realized by controlling a film thickness or bycontrolling a refractive index.

Regarding a material for the transparent films 32 and 42, a transparentconductive film made for example of ITO (indium tin oxide) achieves thesame effect. A transparent insulating film made for example of SiN,SiO₂, Al₂O₃, transparent MN, Ta₂O₅, ZrO₂, Y₂O₃, HfO₂, Nb₂O₅, or TiO₂ isalso applicable.

The translucent films 33 and 43 are each described as an Mo film andhaving a thickness of 5 nm. Such an Mo film is not the only example ofthe translucent films 33 and 43. Any film adjusted so as to achieve alight transmittance of from 20% to 70% is applicable as the translucentfilms 33 and 43. Additionally, it is desirable that the translucentfilms 33 and 43 have a transmittance greater than a reflectance. By wayof example, if the translucent films 33 and 43 are made of a metal suchas Cr, Ti (titanium), Ni (nickel), Ta (tantalum), and W (tungsten), oran alloy mainly containing any of these metals listed here such as aCr-based alloy, and have a thickness of from 2 to 7 nm, desirably from 5to 6 nm, reflection of light from the conductive films 31 and 41 can bereduced.

If the touch panel 12 of FIG. 2 is turned upside down to make the rearsurface of the touch panel 12 (surface of the transparent substrate 20on which films are not laminated) become the front surface of thedisplay 100, the vertical positions of the translucent film, thetransparent film, and the conductive film forming the aforementionedlaminated structure are changed relative to each other. In this case, bylaminating the translucent film, the transparent film, and theconductive film in this order as viewed from a foundation layer,reflection of light to enter from the front surface of the display 100corresponding to the rear surface of the touch panel 12, namely, lightto enter from the foundation layer can be reduced.

As described above, turning the touch panel 12 upside down changes thevertical positions of the films in the laminated structure relative toeach other, and this is also applicable to the case where films in thelaminated structure are formed on the protection glass 13. Morespecifically, laminating the translucent film, the transparent film, andthe conductive film in this order on a surface of the protection glass13 opposite the front surface of the display 100 can also reducereflection of light to enter from the foundation layer.

The upper wiring 40 functioning as the Y position detection wiring has alength greater than that of the lower wiring 30. Hence, for reduction inwiring resistance, the conductive film 41 of the upper wiring 40 isformed to a thickness greater than that of the conductive film 31 of thelower wiring 30 as described above. However, the respective conductivefilms of the lower and upper wirings 30 and 40 may have thicknessesarbitrarily determined based on required resistance values.

The thickness of the interlayer insulating film 21 can be determinedarbitrarily based on a desired electrostatic capacitance, for example.The thickness of the protection insulating film 22 can be determinedbased on a selection ratio between a resist and the protectioninsulating film 22 determined for dry etching process and time of thedry etching process, for example. Meanwhile, a greater thickness of theinterlayer insulating film 21 is likely to reduce a difference in colortone and reflectance between the interlayer insulating film 21 and thelower wiring 30. Thus, if possible, the thickness of the interlayerinsulating film 21 is determined to be about 1 μm, and more desirably,to be 1.3 μm or more.

The interlayer insulating film 21 and the protection insulating film 22are each described as a silicon oxide film in the aforementionedexample. However, a silicon oxide film is not the only example. Each ofthe interlayer insulating film 21 and the protection insulating film 22may also be an SOG (spin on glass) film formed by coating, as long assuch a film does not generate undesirable coloring of light to passthrough a light-transmitting part except a wiring part. Using an SOGfilm as an interlayer insulating film also achieves the effect ofsuppressing a short-circuit to be generated at an intersection of anupper wiring and a lower wiring.

The translucent films 33 and 43 are not required to be uniform inthickness, as long as they have a transmittance of from 20% to 70%. Byway of example, the translucent films 33 and 43 may have a film patterncomposed of a light-shielding part and a transmitting part. FIGS. 5 to 7show examples of such a film pattern.

FIG. 5 shows a grid film pattern. The light-shielding part is composedof a grid GR, the transmitting part is composed of opening parts OP, andthe grid GR is formed such that a ratio of the opening parts OP is from20% to 70%. As a result, a translucent film having a transmittance offrom 20% to 70% is obtained.

FIG. 6 shows a strip film pattern. The light-shielding part is composedof stripes SR, the transmitting part is composed of opening parts OP inthe shape of slits, and the stripes SR are formed such that a ratio ofthe opening parts OP is from 20% to 70%. As a result, a translucent filmhaving a transmittance of from 20% to 70% is obtained.

FIG. 7 shows a dotted film pattern. The light-shielding part is composedof dots PR, the transmitting part is composed of an opening part OPother than the dots PR, and the dots PR are formed such that a ratio ofthe opening part OP is from 20% to 70%. As a result, a translucent filmhaving a transmittance of from 20% to 70% is obtained.

FIG. 8 shows a structure in cross section taken along line D-D of FIG.5. As shown in FIG. 8, a translucent film 33A is composed oflight-shielding parts 333 formed on the transparent film 32 to be spacedfrom each other, and transmitting parts 334 defined between thelight-shielding parts 333. In the grid film pattern of FIG. 5, thelight-shielding parts 333 correspond to the grid GR, and thetransmitting parts 334 correspond to the opening parts OP. The structurein cross section of FIG. 8 is also applied to the patterns of FIGS. 6and 7.

The film patterns described by referring to FIGS. 5 to 7 are eachcomposed of a combination of a light-shielding part and a transmittingpart. A film pattern may also be composed of a combination of alight-shielding part and a translucent part such as that shown in FIG.9, or a combination of a transmitting part and a translucent part suchas that shown in FIG. 10.

More specifically, referring to FIG. 9, a translucent film 33B iscomposed of light-shielding parts 333 formed on the transparent film 32to be spaced from each other, and translucent parts 335 defined betweenthe light-shielding parts 333 and thinner than the light-shielding parts333. In the grid film pattern of FIG. 5, the light-shielding parts 333correspond to the grid GR, and the translucent parts 335 correspond tothe opening parts OP.

Referring to FIG. 10, a translucent film 33C is composed of translucentparts 335 formed on the transparent film 32 to be spaced from eachother, and transmitting parts 334 defined between the translucent parts335. In the grid film pattern of FIG. 5, the translucent parts 335correspond to the grid GR, and the transmitting parts 334 correspond tothe opening parts OP.

The light-shielding part mentioned herein means a part having atransmittance of 20% or less. The transmitting part mentioned hereinmeans a part having a transmittance of 70% or more. The translucent partmentioned herein means a part having a transmittance of from 20% to 70%.

FIG. 11 shows the structure in cross section of the terminal part 5 ofthe touch panel 12 taken along line C-C of FIG. 1. The terminal part 5includes a lower wiring terminal 301 to be connected to the lower wiring30, and an upper wiring terminal 401 to be connected to the upper wiring40. The lower wiring terminal 301 is formed in the same step as thelower wiring 30, whereas the upper wiring terminal 401 is formed in thesame step as the upper wiring 40.

As shown in FIG. 11, the lower wiring terminal 301 is a laminated wiringcomposed of the conductive film 31, the transparent film 32, and thetranslucent film 33 laminated in this order on the transparent substrate20. A contact hole CH1 is formed so as to penetrate the interlayerinsulating film 21 and the protection insulating film 22 existing abovethe lower wiring terminal 301. A contact hole is also called an openingpart.

The upper wiring terminal 401 is a laminated wiring composed of theconductive film 41, the transparent film 42, and the translucent film 43laminated in this order on the interlayer insulating film 21. A contacthole CH2 is formed so as to penetrate the protection insulating film 22existing above the upper wiring terminal 401. The terminal part 5 iselectrically connected via the contact holes CH1 and CH2 and an FPC to acontrol substrate, for example.

By using an Al alloy containing Ni as a material for the conductivefilms 31 and 41 and forming the transparent films 32 and 42 astransparent conductive films made for example of IZO, increase incontact resistance between the conductive film and the transparent filmabove the conductive film can be suppressed.

By forming the transparent films 32 and 42 as transparent conductivefilms made for example of IZO and using Mo as a material for thetranslucent films 33 and 43, increase in contact resistance between thetransparent conductive film and the translucent film can be suppressed.This can also reduce a contact resistance regarding connection via anFPC using an ACF (anisotropic conductive film), without the need ofeliminating the translucent film and the transparent film in the openingpart of the terminal part 5.

A contact resistance may be increased depending on a combination of thetranslucent film and the transparent film to be selected. In this case,a contact resistance between the FPC and the terminal can be reduced bythe structure of FIG. 12 where the translucent films and the transparentfilms are removed.

More specifically, in the structure of FIG. 12, the contact hole CH1penetrating the interlayer insulating film 21 and the protectioninsulating film 22 existing above the lower wiring terminal 301 furtherpenetrates the transparent film 32 and the translucent film 33 to reachthe conductive film 31. Further, the contact hole CH2 penetrating theprotection insulating film 22 existing above the upper wiring terminal401 further penetrates the transparent film 42 and the translucent film43 to reach the conductive film 41.

This structure allows increase of the S/N ratio of a signal and providesa stable contact resistance of the terminal, thereby enhancingreliability.

As described above, by forming the wiring as a laminated film composedof the conductive film, the transparent film, and the translucent film,light having entered from outside and to be emitted after having passedthrough the translucent film and reflected off the conductive film, andlight to reflect off a surface of the translucent film, can be cancelledout by optical interference effect. This reduces reflection in thewiring, thereby providing enhanced visibility of representation on thedisplay.

The conductive film is not always made of an Al-based alloy, butconductive films formed in various processes are applicable.Additionally, using IZO hard to crystallize as a material for thetransparent film allows the transparent film to be processed easily.During process, the transmittance of the IZO hard to crystallize doesnot change seriously compared to ITO that is easy to crystallize. Byusing Mo as a material for the translucent film, fluctuations inin-plane reflectance are suppressed, thereby achieving a display havinga uniform reflectance in a display surface and a low-reflection wiring.The laminate of the transparent film and the translucent film suppressesreflection as a result of optical interference effect, so that it can becalled a reflection suppressing film.

A method of manufacturing the display according to the first preferredembodiment of the present invention is described next by referring tothe sectional views of FIGS. 13 to 22 showing steps of manufacturing thetouch panel 12 in order.

First, in the step shown in FIG. 13, by using an AlNiNd target, anAlNiNd film 311 is deposited by sputtering process on the transparentsubstrate 20 made of glass, PET or the like to a thickness of 300 nm.Then, an IZO film 321 is deposited by sputtering process on the AlNiNdfilm 311 to a thickness of 50 nm. Then, an Mo film 331 is deposited bysputtering process on the IZO film 321 to a thickness of 5 nm.

Next, a resist material is applied on the Mo film 331, and then patternsfor a lower wiring, a lower wiring terminal, and a mark are exposed anddeveloped, thereby patterning a resist mask RM1 having the patterns forthe lower wiring, the lower wiring terminal, and the mark group(including a mark and an ID, for example) as shown in FIG. 14. In thedrawings mentioned below, a region where the lower wiring is formed iscalled a lower wiring region, a region where the lower wiring terminalis formed is called a lower wiring terminal region, and a region wherethe mark group is formed is called a mark region. The lower wiringregion, the lower wiring terminal region, and the mark region areillustrated as being formed in a line in FIGS. 14 to 22. This way ofillustration is merely for the sake of convenience and is intended tofacilitate understanding of the idea of the invention.

Next, as shown in FIG. 15, by using the resist mask RM1 as an etchingmask, the Mo film 331 is etched for example with mixed acid ofphosphoric acid, nitric acid, and acetic acid. Next, the IZO film 321 isetched with an oxalic acid solution, thereby patterning the translucentfilm 33 and the transparent film 32. Then, the AlNiNd film 311 is etchedfor example with mixed acid of phosphoric acid, nitric acid, and aceticacid to pattern the conductive film 31.

Next, the resist mask RM1 is removed with a resist stripping liquid suchas a mixed liquid of monoethanolamine and dimethyl sulfoxide, therebyforming the lower wiring 30, the lower wiring terminal 301, and a markgroup MK shown in FIG. 16.

Next, as shown in FIG. 17, a silicon oxide film is deposited for exampleby CVD (chemical vapor deposition) process to a thickness of about 600nm so as to cover the lower wiring 30, the lower wiring terminal 301,and the mark group MK, thereby forming the interlayer insulating film21.

Next, as shown in FIG. 18, by using an AlNiNd target, an AlNiNd film 411is deposited by sputtering process on the interlayer insulating film 21to a thickness of 400 nm. Then, an IZO film 421 is deposited bysputtering process on the AlNiNd film 411 to a thickness of 50 nm. Then,an Mo film 431 is deposited by sputtering process on the IZO film 421 toa thickness of 5 nm.

Next, a resist material is applied on the Mo film 431, and then patternsfor an upper wiring and an upper wiring terminal are exposed anddeveloped, thereby patterning a resist mask RM2 having the patterns forthe upper wiring and the upper wiring terminal as shown in FIG. 19.

Next, as shown in FIG. 20, by using the resist mask RM2 as an etchingmask, the Mo film 431 is etched for example with mixed acid ofphosphoric acid, nitric acid, and acetic acid. Next, the IZO film 421 isetched with an oxalic acid solution, thereby patterning the translucentfilm 43 and the transparent film 42. Then, the AlNiNd film 411 is etchedfor example with mixed acid of phosphoric acid, nitric acid, and aceticacid to pattern the conductive film 41.

Next, the resist mask RM2 is removed with a resist stripping liquid suchas a mixed liquid of monoethanolamine and dimethyl sulfoxide, therebyforming the upper wiring 40 and the upper wiring terminal 401 shown inFIG. 21. In the drawings mentioned below, a region where the upperwiring is formed is called an upper wiring region and a region where theupper wiring terminal is formed is called an upper wiring terminalregion.

Next, as shown in FIG. 22, an Sift, film is deposited for example by CVDprocess to a thickness of about 300 nm so as to cover the upper wiring40 and the upper wiring terminal 401, thereby forming the protectioninsulating film 22.

Then, a resist material is applied on the protection insulating film 22.Next, opening patterns for the lower wiring terminal 301, the upperwiring terminal 401, and the mark group MK are exposed and developed,thereby patterning a resist mask (not shown in the drawings) having theopening patterns for the lower and upper wiring terminals 301 and 401.Next, by using this resist mask as an etching mask, the protectioninsulating film 22 and the interlayer insulating film 21 existing abovethe lower wiring terminal 301 are removed by dry etching, therebyforming the contact hole CH1 reaching the translucent film 33. Further,the protection insulating film 22 existing above the upper wiringterminal 401 is removed to form the contact hole CH2 reaching thetranslucent film 43. As a result, a touch panel including the wirings ofFIG. 4 and the wiring terminals of FIG. 11 is formed.

The aforementioned manufacturing method allows formation of thelow-reflection wirings, wiring terminals, and mark group withoutinvolving an additional step.

After the wirings and the wiring terminals are formed, a mothersubstrate is divided for example by scribing process with a wheel cutteror laser cutting process with laser light into individual touch panels.

Next, a display is assembled by following the steps shown in FIGS. 23Ato 23D. More specifically, as shown in FIG. 23A, after the panel iscleaned, a surface protection sheet 15 for protecting the touch panel 12from a scratch during mounting is bonded to a touch-sensitive surface ofthe touch panel 12. A protection sheet may further be bonded to asurface of the touch panel 12 opposite the touch-sensitive surface.

Next, as shown in FIG. 23B, an ACF 151 is arranged on the wiringterminal, and an FPC 152 is mounted by thermal compression bonding.

Next, the surface protection sheet 15 is peeled off the touch panel 12.Then, as shown in FIG. 23C, a two-sided adhesive sheet 16 is attached tothe touch panel 12, and the protection glass 13 is adhesively connectedto the touch panel 12 via the two-sided adhesive sheet 16.

Next, as shown in FIG. 23D, a two-sided adhesive sheet 17 is attached tothe rear surface (surface opposite the touch-sensitive surface) of thetouch panel 12, and the display module 11 is adhesively connected to thetouch panel 12 via the two-sided adhesive sheet 17. If a protectionsheet is bonded to the surface of the touch panel 12 opposite thetouch-sensitive surface, this protection sheet is peeled beforeattachment of the two-sided adhesive sheet 17.

Although not shown in the drawings, the FPC 152 mounted on the touchpanel 12 is connected to a connector of a touch panel control substrateTC arranged on the back surface of the display module 11. Then, theaforementioned components are assembled into the casing to obtain thedisplay 100 shown in FIG. 2.

As described above, the display module 11 is arranged on the rearsurface of the touch panel 12, and external light enters the display 100from a side opposite the display module 11. Meanwhile, as a result ofthe presence of the low-reflection wiring on the front surface of thetouch panel 12, reflection of external light incident on a surface ofthe conductive film is suppressed. As a result, a display havingexcellent visibility is obtained.

The aforementioned steps are not the only steps of the manufacturingmethod of the present invention. By way of example, if the rear surfaceof the touch panel is formed as a low-reflection surface, protectionglass can become unnecessary. Or, two touch panels can be prepared andadhesively connected.

Second Preferred Embodiment

A second preferred embodiment of the present invention is described nextby referring to FIGS. 24 to 28. Structures corresponding to thoseappearing in the manufacturing method of the first preferred embodimentdescribed by referring to FIGS. 13 to 22 are identified by the samereference numbers, and will not be described repeatedly for the samepurpose.

First, in the step shown in FIG. 24, by using an AlNiNd target, anAlNiNd film 311 to become a conductive film is deposited by sputteringprocess on a transparent substrate 20 to a thickness of 300 nm. Then, anITO film 321 to become a transparent film is deposited by sputteringprocess on the AlNiNd film 311 to a thickness of 60 nm. Then, a Cr film331 to become a translucent film is deposited by sputtering process onthe ITO film 321 to a thickness of 5 nm. Next, an Mo film 341 to becomea non low-reflection film is deposited by sputtering process on the Crfilm 331 to a thickness of 10 nm.

Next, a resist material is applied on the Mo film 341, and then patternsfor a lower wiring, a lower wiring terminal, and a mark are exposed anddeveloped, thereby patterning a resist mask RM3 having the patterns forthe lower wiring, the lower wiring terminal, and the mark group(including a mark and an ID, for example) as shown in FIG. 25.

Next, as shown in FIG. 26, by using the resist mask RM3 as an etchingmask, the Mo film 341 is etched for example with mixed acid ofphosphoric acid, nitric acid, and acetic acid. Next, the Cr film 331 isetched with a mixed liquid of nitric acid and ceric ammonium nitrate.Then, the ITO film 321 is etched with an oxalic acid solution, therebypatterning a non low-reflection film 34, a translucent film 33, and atransparent film 32. Then, the AlNiNd film 311 is etched for examplewith mixed acid of phosphoric acid, nitric acid, and acetic acid topattern a conductive film 31.

Next, as shown in FIG. 27, the resist mask RM3 is removed with a resiststripping liquid such as a mixed liquid of monoethanolamine and dimethylsulfoxide.

Then, the non low-reflection film 34 is removed for example with mixedacid of phosphoric acid, nitric acid, and acetic acid, thereby a lowerwiring 30, a lower wiring terminal 301, and a mark group MK shown inFIG. 28.

An upper wiring 40 and an upper wiring terminal 401 are formed by thesame method as that of the first preferred embodiment, so that formationthereof is not described again.

As described above, in the manufacturing method of the second preferredembodiment, the non low-reflection film 341 is formed once on thetranslucent film 331. The non low-reflection film 341 is a film torealize stable focusing operation on the entire substrate duringexposure after application of the resist material of a certain thicknessin the photolithography step for forming the lower wiring. The nonlow-reflection film 341 has a reflectance for example of 25% or morerelative to light from a light source for the focusing operation.

It is desirable that the non low-reflection film 341 be made of amaterial having high etching selectivity compared to the conductive film311. If having low etching selectivity, the non low-reflection film 341may be formed to the smallest possible thickness within a range thatsatisfies the aforementioned reflectance, thereby preventing the wiringfrom becoming a canopy shape.

As described above, the non low-reflection film is formed duringformation of the patterns for the lower wiring, the lower wiringterminal, and the mark group. This facilitates printing of a panel ID ora sheet ID and ensures traceability even on the occurrence of a troublein a device in an array step, thereby contributing to qualitystabilization.

<Modification>

In the aforementioned second preferred embodiment, a non low-reflectionfilm is formed on a translucent film. The non low-reflection film mayalso be formed on a transparent film. A method of manufacturing such astructure is described below by referring to FIGS. 29 to 33.

First, in the step shown in FIG. 29, by using an AlNiNd target, anAlNiNd film 311 to become a conductive film is deposited by sputteringprocess on a transparent substrate 20 to a thickness of 300 nm. Then, anITO film 321 to become a transparent film is deposited by sputteringprocess on the AlNiNd film 311 to a thickness of 50 nm. Then, an Mo film341 to become a non low-reflection film is deposited by sputteringprocess on the ITO film 321 to a thickness of 10 nm.

Next, a resist material is applied on the Mo film 341, and then patternsfor a lower wiring, a lower wiring terminal, and a mark are exposed anddeveloped, thereby patterning a resist mask RM4 having the patterns forthe lower wiring, the lower wiring terminal, and the mark group(including a mark and an ID, for example) as shown in FIG. 30.

Next, as shown in FIG. 31, by using the resist mask RM4 as an etchingmask, the Mo film 341 is etched for example with mixed acid ofphosphoric acid, nitric acid, and acetic acid. Then, the ITO film 321 isetched with an oxalic acid solution, thereby patterning a nonlow-reflection film 34 and a transparent film 32. Next, the AlNiNd film311 is etched for example with mixed acid of phosphoric acid, nitricacid, and acetic acid to pattern a conductive film 31.

Next, as shown in FIG. 32, the resist mask RM4 is removed with a resiststripping liquid such as a mixed liquid of monoethanolamine and dimethylsulfoxide.

Then, as shown in FIG. 33, the non low-reflection film 34 is half etchedto be reduced in thickness to about 5 nm. As a result, the nonlow-reflection film 34 is given light-transmitting properties to becomeusable as a translucent film 33.

Exemplary ways of the half etching include dry etching process with CF₄gas and the like, and process realized by a combination of surfaceoxidation with O₂ plasma and removal of the resultant oxidized Mosurface.

An upper wiring 40 and an upper wiring terminal 401 are formed by thesame method as that of the first preferred embodiment, so that formationthereof is not described again.

The aforementioned manufacturing method can reduce steps of formingfilms to function optically, compared to the case where both a nonlow-reflection film and a translucent film are formed. This achievesreduction in material for film deposition and reduction in requiredetching unit, thereby allowing reduction in cost for manufacturingprocesses.

Third Preferred Embodiment

FIG. 34 shows the structure in cross section of a touch panel 12 of athird preferred embodiment. As shown in FIG. 34, the touch panel 12 ofthe third preferred embodiment includes: a transparent substrate 20; alower wiring 30B, a lower wiring terminal 301B, and a mark group MK1arranged on the transparent substrate 20; and an interlayer insulatingfilm 21 arranged so as to cover the lower wiring 30B, the lower wiringterminal 301B, and the mark group MK1. The lower wiring 30B, the lowerwiring terminal 301B, and the mark group MK1 are each a laminated wiringcomposed of a conductive film 31, a transparent film 32, a translucentfilm 33, and a transparent film 35 laminated in this order.

An upper wiring 40B and an upper wiring terminal 401B are arranged onthe interlayer insulating film 21. The upper wiring 40B and the upperwiring terminal 401B are each a laminated wiring composed of aconductive film 41, a transparent film 42, a translucent film 43, and atransparent film 45 laminated in this order. A protection insulatingfilm 22 is arranged so as to cover the upper wiring 40B and the upperwiring terminal 401B.

The conductive film 31 is made of an Al-based alloy such as AlNiNd as alow-resistance material and has a thickness of 300 nm, for example.

The transparent film 32 is composed of an IZO film and has a thicknessof 50 nm, for example. The translucent film 33 is composed of an Mo filmand has a thickness of 8 nm, for example. The transparent film 35 iscomposed of an IZO film and has a thickness of 60 nm, for example. Theinterlayer insulating film 21 is composed of a silicon oxide film andhas a thickness of 600 nm, for example.

The conductive film 41 is made of an Al-based alloy such as AlNiNd as alow-resistance material and has a thickness of 400 nm, for example. Thetransparent film 42 is composed of an IZO film and has a thickness of 50nm, for example. The translucent film 43 is composed of an Mo film andhas a thickness of 8 nm, for example. The transparent film 45 iscomposed of an IZO film and has a thickness of 60 nm, for example. Theprotection insulating film 22 is composed of a silicon oxide film andhas a thickness of 300 nm, for example.

A contact hole CH1 is formed above the lower wiring terminal 301B so asto penetrate the protection insulating film 22 and the interlayerinsulating film 21 to reach the transparent film 35. A contact hole CH2is formed above the upper wiring terminal 401B so as to penetrate theprotection insulating film 22 to reach the transparent film 45.

As shown FIG. 35, the contact hole CH1 may also be formed so as topenetrate the transparent film 35, the translucent film 33, and thetransparent film 32 to reach the conductive film 31. Further, thecontact hole CH2 may also be formed so as to penetrate the transparentfilm 45, the translucent film 43, and the transparent film 42 to reachthe conductive film 41. In this case, a contact resistance between anFPC and a terminal can be reduced.

The contact hole CH1 may not penetrate all of the transparent film 35,the translucent film 33, and the transparent film 32, but it maypenetrate some of the laminated films. Further, the contact hole CH2 maynot penetrate all of the transparent film 45, the translucent film 43,and the transparent film 42, but it may penetrate some of the laminatedfilms. In this case, a contact resistance between an FPC and a terminalcan be reduced.

In the aforementioned touch panel 12 of the third preferred embodiment,the translucent film is covered with the transparent film. This cansuppress change of the transmittance and the reflectance of thetranslucent film due to oxidation thereof to occur if the laminatedfilms are subjected to a thermal step before formation of the interlayerinsulating film 21 and the protection insulating film 22, therebyachieving a stable low-reflection structure.

Forming an wiring as the laminated wiring of the conductive film, thetransparent film, the translucent film, and the transparent filmenhances effect realized by interference between reflected light at aninterface of the transparent film with the interlayer insulating film orthe protection insulating film and reflected light from a lower layerderived from transmitted light, thereby achieving lower reflection.

The transparent films 32 and 42 are each described as a transparent filmcomposed of an IZO film and having a thickness of 50 nm. Such atransparent film is not the only example of the transparent films 32 and42. Any transparent film adjusted so as to achieve an optical pathlength of from 0.09 to 0.14 μm can reduce reflection of light from theconductive films 31 and 41.

Regarding a material for the transparent films 32 and 42, a transparentconductive film made for example of ITO achieves the same effect. Atransparent insulating film made for example of SiN, SiO₂, Al₂O₃,transparent AlN, Ta₂O₅, ZrO₂, Y₂O₃, HfO₂, Nb₂O₅, or TiO₂ also achievesthe same effect.

The transparent films 35 and 45 are each described as a transparent filmcomposed of an IZO film and having a thickness of 60 nm. Such atransparent film is not the only example of the transparent films 35 and45. As long as the transparent films 35 and 45 are made of a materialhaving a refractive index higher than that of an insulating film closeto incident light from outside, reflection is prevented effectively.

A transparent film adjusted in thickness so as to provide an opticalpath length of from 0.02 to 0.20 μm and desirably, from 0.07 to 0.15 μmcan reduce reflection of light from the conductive films 31 and 41.

It is desirable that the transparent film 32 be shorter in optical pathlength than the transparent film 35 and the transparent film 42 beshorter in optical path length than the transparent film 45. Making thetransparent films 35 and 45 longer in optical path length than thetransparent films 32 and 42 respectively reduces reflection of visiblelight in a short wavelength region sufficiently in a lower layer andreduces reflection of light from a different region sufficiently only inan upper layer or both in the upper and lower layers. As a result, lightto reflect off the conductive film can be reduced more reliably.

If the touch panel 12 of FIG. 2 is turned upside down to make the rearsurface of the touch panel 12 (surface of the transparent substrate 20on which films are not laminated) become the front surface of thedisplay 100, the vertical positions of the transparent film, thetranslucent film, the transparent film, and the conductive film formingthe aforementioned laminated structure are changed relative to eachother. In this case, by laminating the transparent film, the translucentfilm, the transparent film, and the conductive film in this order asviewed from a foundation layer, reflection of light to enter from thefront surface of the display 100 corresponding to the rear surface ofthe touch panel 12, namely, light to enter from the foundation layer canbe reduced.

As described above, turning the touch panel 12 upside down changes thevertical positions of the films in the laminated structure relative toeach other, and this is also applicable to the case where films in thelaminated structure are formed on the protection glass 13. Morespecifically, laminating the transparent film, the translucent film, thetransparent film, and the conductive film in this order on a surface ofthe protection glass 13 opposite the front surface of the display 100can also reduce reflection of light to enter from the foundation layer.In this structure, the transparent film close to the foundation layer ismade of a material higher in refractive index than that of thefoundation layer.

Regarding a material for the transparent films 35 and 45, a transparentconductive film made for example of ITO achieves the same effect. Atransparent insulating film made for example of SiN, Al₂O₃, transparentMN, Ta₂O₅, ZrO₂, Y₂O₃, HfO₂, Nb₂O₅, or TiO₂ is also applicable.

The translucent films 33 and 43 are each described as an Mo film andhaving a thickness of 8 nm. Such an Mo film is not the only example ofthe translucent films 33 and 43. Any film adjusted so as to achieve alight transmittance of from 10% to 70% is applicable as the translucentfilms 33 and 43. By way of example, the translucent films 33 and 43 aremade of a metal such as Cr, Ti, Ni, Ta, and W, or an alloy mainlycontaining any of these metals listed here such as a Cr-based alloy, andhave a thickness of from 2 to 12 nm, desirably about 8 nm.

The conductive films 31 and 41 are described as being made of AlNiNd inthe aforementioned example. Each of the conductive films 31 and 41 mayalso be a film of Al and a different Al-based alloy, a laminated film ofAg and an Ag-based alloy, a film of Cu and a Cu-based alloy, a laminatedfilm of Cr and an Al-based alloy, or a laminated film of Mo and anAl-based alloy.

Like the transparent films 32 and 42, the transparent films 35 and 45can be formed by sputtering process, and the other films are formed inthe method described in the first preferred embodiment. Thus, themanufacturing method of the third preferred embodiment will not bedescribed.

<Modification>

Like in the second preferred embodiment, in the aforementioned structurein cross section of the touch panel 12 of the third preferredembodiment, a non low-reflection film may be formed as the uppermostsurface during formation of a lower wiring, and the non low-reflectionfilm may be removed after patterning of the lower wiring.

More specifically, an Mo film to become the non low-reflection film isdeposited on the transparent film 35 to a thickness of 10 nm. Afterpatterning by photolithography, the non low-reflection film as theuppermost surface is removed by etching. In this way, the nonlow-reflection film is formed during formation of the patterns for thelower wiring, the lower wiring terminal, and the mark. This facilitatesprinting of a panel ID or a sheet ID and ensures traceability even onthe occurrence of a trouble in a device in an array step, therebycontributing to quality stabilization.

To increase etching selectively relative to a transparent film,annealing may be performed in a temperature of about 230° C. for exampleto make the transparent film crystallize before the non low-reflectionfilm is removed. In this case, it is desirable that the transparent filmbe made of a material such as ITO that crystallizes as a result ofheating process.

Fourth Preferred Embodiment

FIG. 36 shows the structure in cross section of a touch panel 12 of afourth preferred embodiment. As shown in FIG. 36, the touch panel 12 ofthe fourth preferred embodiment includes: a transparent substrate 20; alower wiring 30C, a lower wiring terminal 301C, and a mark group MK2arranged on the transparent substrate 20; and an interlayer insulatingfilm 21 provided so as to cover the lower wiring 30C, the lower wiringterminal 301C, and the mark group MK2. The lower wiring 30C, the lowerwiring terminal 301C, and the mark group MK2 are each a laminated wiringcomposed of a conductive film 31 and a transparent film 32 laminated inthis order.

An upper wiring 40C and an upper wiring terminal 401C are arranged onthe interlayer insulating film 21. The upper wiring 40C and the upperwiring terminal 401C are each a laminated wiring composed of aconductive film 41 and a transparent film 42 laminated in this order. Aprotection insulating film 22 is arranged so as to cover the upperwiring 40C and the upper wiring terminal 401C.

The conductive film 31 is made of an Mo-based alloy such as MoNb and hasa thickness of 300 nm, for example.

The transparent film 32 is composed of an IZO film and has a thicknessof 60 nm, for example. The interlayer insulating film 21 is composed ofa silicon oxide film and has a thickness of 600 nm, for example.

The conductive film 41 is made of an Mo-based alloy such as MoNb and hasa thickness of 400 nm, for example.

The transparent film 42 is composed of an IZO film and has a thicknessof 60 nm, for example. The protection insulating film 22 is composed ofa silicon oxide film and has a thickness of 300 nm, for example.

A contact hole CH1 is formed above the lower wiring terminal 301C so asto penetrate the protection insulating film 22 and the interlayerinsulating film 21 to reach the transparent film 32. A contact hole CH2is formed above the upper wiring terminal 401C so as to penetrate theprotection insulating film 22 to reach the transparent film 42.

The aforementioned touch panel 12 of the fourth preferred embodimentdoes not include a translucent film between the conductive film and thetransparent film, so that film deposition process is managed easily.

The transparent films 32 and 42 are each described as a transparent filmcomposed of an IZO film and having a thickness of 60 nm. Such atransparent film is not the only example of the transparent films 32 and42. The transparent films 32 and 42 may be made of any material that hasa refractive index higher than that of an insulating film close toincident light from outside. A transparent film adjusted in thickness soas to provide an optical path length of from 0.02 to 0.20 μm anddesirably, from 0.07 to 0.15 μm is also applicable as the transparentfilms 32 and 42.

Regarding a material, the transparent films 32 and 42 may each be atransparent conductive film made for example of ITO, or a transparentinsulating film made for example of SiN, Al₂O₃, transparent AlN, Ta₂O₅,ZrO₂, Y₂O₃, HfO₂, Nb₂O₅, or TiO₂.

The conductive films 31 and 41 are described as being made of MoNb inthe aforementioned example. Each of the conductive films 31 and 41 mayalso be a conductive film made of a material such as Cr, Ti, Ni, Ta, andW that have a reflectance of 70% or less in a visible light region (from380 nm to 780 nm).

Additionally, forming a laminated structure by adding a conductive filmas a lower layer made of a material such as an Al alloy having aresistivity of 10 μΩcm or less at room temperature achieves reduction inreflection of light and at the same time, reduction in wiringresistance.

Fifth Preferred Embodiment

FIG. 37 shows the structure in cross section of a touch panel 12 of afifth preferred embodiment. As shown in FIG. 37, the touch panel 12 ofthe fifth preferred embodiment includes: a transparent substrate 20; alower wiring 30D, a lower wiring terminal 301D, and a mark group MK3arranged on the transparent substrate 20 and each composed of aconductive film 31; a transparent film 36 as an antireflection filmarranged so as to cover the lower wiring 30D, the lower wiring terminal301D, and the mark group MK3; and an interlayer insulating film 21arranged so as to cover the transparent film 36.

An upper wiring 40D and an upper wiring terminal 401D, each composed ofa conductive film 41, are arranged on the interlayer insulating film 21.A transparent film 46 as an antireflection film is arranged so as tocover the upper wiring 40D and the upper wiring terminal 401D. Aprotection insulating film 22 is arranged so as to cover the transparentfilm 46.

The conductive film 31 is made of an Mo-based alloy such as MoNb and hasa thickness of 300 nm, for example.

The transparent film 36 is composed of an SiN film and has a thicknessof 55 nm, for example. The interlayer insulating film 21 is composed ofa silicon oxide film and has a thickness of 600 nm, for example.

The conductive film 41 is made of an Mo-based alloy such as MoNb and hasa thickness of 400 nm, for example.

The transparent film 46 is composed of an SiN film and has a thicknessof 55 nm, for example. The protection insulating film 22 is composed ofa silicon oxide film and has a thickness of 300 nm, for example.

A contact hole CH1 is formed above the lower wiring terminal 301D so asto penetrate the protection insulating film 22, the transparent film 46,the interlayer insulating film 21, and the transparent film 36 to reachthe conductive film 31. A contact hole CH2 is formed above the upperwiring terminal 401D so as to penetrate the protection insulating film22 and the transparent film 46 to reach the conductive film 41.

In the aforementioned touch panel 12 of the fifth preferred embodiment,a side surface of the wiring is also covered with the transparent film,allowing suppression of reflection at the side surface of the wiring.This achieves a favorable low-reflection wiring, even if the wiring isreduced in width and increased in thickness with the intention ofincreasing the aperture ratio of the touch panel.

As a result of the aforementioned simple wiring structure, a filmdeposition step and a patterning step can be simplified, achievingreduction in manufacturing steps. If the transparent films 36 and 46 aredeposited by CVD process, a low-reflection structure can extend furtherto be closer to a substrate edge. This can increase the number of panelsto be obtained from one mother substrate, allowing reduction inmanufacturing cost.

The transparent films 36 and 46 are each described as a transparent filmcomposed of an SiN film and having a thickness of 55 nm. Such atransparent film is not the only example of the transparent films 36 and46. As long as the transparent films 36 and 46 are made of a materialhaving a refractive index higher than that of an insulating film closeto incident light from outside, reflection is prevented effectively.

A transparent film adjusted in thickness so as to provide an opticalpath length of from 0.02 to 0.20 μm and desirably, from 0.07 to 0.15 μmcan reduce reflection of light from the conductive films 31 and 41.

Regarding a material, the transparent films 36 and 46 may be atransparent insulating film made for example of Al₂O₃, transparent AlN,Ta₂O₅, ZrO₂, Y₂O₃, HfO₂, Nb₂O₅, or TiO₂.

It is desirable that the transparent films 36 and 46 be made of amaterial and have a thickness that make light to pass through part whereno wiring is formed become whitish.

The conductive films 31 and 41 are each described as being made of MoNbin the aforementioned example. Each of the conductive films 31 and 41may also be a conductive film made of a material such as Cr, Ti, Ni, Ta,and W that have a reflectance of 70% or less in a visible light region(from 380 nm to 780 nm).

<First Modification>

In the aforementioned fifth preferred embodiment, the lower and upperwirings 30D and 40D have a single-layer structure composed of theconductive films 31 and 41 respectively. The lower and upper wiring 30Dand 40D may also be laminated wirings each composed of two layers asshown in FIG. 38.

More specifically, a lower wiring 30E shown in FIG. 38 includes aconductive film such as an Mo-based alloy film 3020 having a reflectanceof 70% or less in a visible light region (from 380 nm to 780 nm), and alow-resistance conductive film such as an Al-based alloy film 3010formed under the Mo-based alloy film 3020 and having a resistivity of 10μΩcm or less at room temperature.

As shown in FIG. 38, the Mo-based alloy film 3020 is formed so as tocover a surface of the Al-based alloy film 3010 trapezoidal in crosssection including a side surface thereof. The transparent film 36 isformed as an antireflection film so as to cover the entire transparentsubstrate 20 from above on which the lower wiring 30E is formed. A lowerwiring terminal, an upper wiring, an upper wiring terminal, and a markgroup have the same structure as that of the lower wiring 30E.

The aforementioned structure achieves reduction in reflection of lightand at the same time, reduction in wiring resistance.

As shown in FIG. 39, the transparent film 36 may be patterned into thesame shape as the lower wiring 30E, and is not always required to coverthe entire transparent substrate 20 from above.

If the transparent film is patterned into the aforementioned shape, notonly a transparent insulating film but also a transparent conductivefilm is applicable as the transparent film.

Regarding the position of the pattern edge of the conductive film andthat of the pattern edge of the transparent film relative to each other,these pattern edges may be at the same position, the edge of theconductive film may be outward of that of the transparent film, or theedge of the transparent film may be outward of that of the conductivefilm as shown in FIG. 39 depending on process of forming the transparentfilm. Any of these relative positions is applicable, whereas it isdesirable that the edge of the transparent film be outward of that ofthe conductive film.

A method of manufacturing the first modification of the fifth preferredembodiment is described next by referring to FIGS. 40 to 43. Only thelower wiring 30E of FIG. 38 is described below. The lower wiringterminal, the upper wiring, the upper wiring terminal, and the markgroup are not shown in the drawings.

As shown in FIG. 40, by using an AlNiNd target, an AlNiNd film to becomea low-resistance conductive film is deposited by sputtering process onthe transparent substrate 20 to a thickness of 300 nm. Then, a resistmaterial is applied on the AlNiNd film, and a resist mask for the lowerwiring, the lower wiring terminal, and the mark group is formed in aphotolithography step.

Next, by using this resist mask as etching masks, the AlNiNd film isetched to pattern the Al-based alloy film 3010.

Next, as shown in FIG. 41, an MoNb film 3021 is deposited for example bysputtering on the Al-based alloy film 3010 to a thickness of 50 nm.

Next, a resist mask is formed so as to cover the Al-based alloy film3010 and the MoNb film 3021 on the Al-based alloy film 3010. Then, byusing this resist mask as an etching mask, part of the MoNb film 3021not covered with the resist mask is removed by etching with mixed acidof phosphoric acid, nitric acid, and acetic acid, thereby providing astructure of FIG. 42 where the Al-based alloy film 3010 is covered withthe Mo-based alloy film 3020.

Removing the MoNb film 3021 from above the mark group in this step cansuppress reduction of a reflectance observed on the mark group after thetransparent film 36 is formed. This allows increase of a markrecognition rate in a later step without the need of removing the MoNbfilm 3021 in a step of forming an opening of a terminal part.

Next, as shown in FIG. 43, an SiN film is formed for example by CVDprocess to a thickness of 50 nm so as to cover the entire transparentsubstrate 20 from above including part thereof on which the Mo-basedalloy film 3020 is formed, thereby obtaining the transparent film 36.

Next, a silicon oxide film is formed as an example of the interlayerinsulating film 21 by CVD process to a thickness of 600 nm, therebyobtaining the structure of FIG. 38. The transparent film 36 and theinterlayer insulating film 21 may be formed in successive filmdeposition steps in a vacuum atmosphere by using the same CVD unit.

The structure of FIG. 39 is obtained as follows. After formation of thetransparent film 36 shown in FIG. 43, a resist mask covering theAl-based alloy film 3010 from above is formed. Next, by using thisresist mask as an etching mask, the transparent film 36 is etched, andthen the resist mask is removed. Next, a silicon oxide film is formed asan example of the interlayer insulating film 21 by CVD process.

After the step of FIG. 41, a transparent film 361 may be obtained byforming an IZO film for example by sputtering process on the MoNb film3021 to a thickness of 60 nm.

Then, a resist mask covering the Al-based alloy film 3010 from above isformed. Next, by using this resist mask as an etching mask, thetransparent film 361 is etched with oxalic acid. The MoNb film 3021 isthereafter etched with mixed acid of phosphoric acid, nitric acid, andacetic acid, and then the resist mask is removed. FIG. 45 shows thecross section of a resultant structure at this stage. In this way, thetransparent film 361 and the Mo-based alloy film 3020 may be patternedin single photolithography.

The Al-based alloy film 3010 as a low-resistance conductive film may bereplaced by a Cu—Mo alloy, and an Mo-based film may be formed on asurface of the Cu—Mo alloy by precipitation caused by heat treatment,for example.

The Mo-based alloy film 3020 is described as being made of MoNb in theaforementioned example. The Mo-based alloy film may be replaced by aconductive film made of a material such as Cr, Ti, Ni, Ta, and W thathave a reflectance of 70% or less in a visible light region (from 380 nmto 780 nm).

<Second Modification>

In the aforementioned fifth preferred embodiment, in the lower wiring30D or 30E, a surface of a film having a reflectance of 70% or less iscovered only with the transparent film 36. Further, in the upper wiring40D or 40E, a surface of a film having a reflectance of 70% or less iscovered only with the transparent film 46. Meanwhile, each of thesefilms may also be covered with multiple films as shown in FIGS. 46 and47.

More specifically, in a lower wiring 30F shown in FIG. 46, a transparentfilm 3020 covers an upper surface and a side surface of a low-resistanceconductive film such as an Al-based alloy film 3010 having a resistivityof 10 μΩ cm or less at room temperature, and a translucent film 3030covers the transparent film 3020 from above. The transparent film 3020and the translucent film 3030 function as antireflection films.

In a lower wiring 30G shown in FIG. 47, the transparent film 3020 coversthe upper surface and the side surface of the Al-based alloy film 3010,the translucent film 3030 covers the transparent film 3020 from above,and a transparent film 3040 covers the translucent film 3030 from above.

The aforementioned structures achieve the same effects as those of thefirst and third preferred embodiments. The materials and the thicknessesof the transparent film and the translucent film can be determined inthe same way as in the first and third preferred embodiments.

In the aforementioned first to fifth preferred embodiments, theinterlayer insulating film and the protection insulating film are eachdescribed as a silicon oxide film. However, a silicon oxide film is notthe only example. As an example, each of the interlayer insulating filmand the protection insulating film may also be an SOG film formed bycoating that does not generate undesirable coloring of light to passthrough a light-transmitting part except a wiring part. Using an SOGfilm as the interlayer insulating film 21 suppresses a short-circuit tobe generated at an intersection of an upper wiring and a lower wiring.

The wirings described in the first to fifth preferred embodiments areapplied as wirings for a touch panel. These wirings may also be appliedas those for a display device, or as light-shielding layers to reducereflection.

The preferred embodiments of the present invention can be combinedfreely, and each of the preferred embodiments can be modified or omittedwhere appropriate without departing from the scope of the invention.

While the invention has been shown and described in detail, theforegoing description is in all aspects illustrative and notrestrictive. It is therefore understood that numerous modifications andvariations can be devised without departing from the scope of theinvention.

What is claimed is:
 1. A display, comprising: a laminated wiring with aconductive film arranged on a foundation layer, a first transparent filmand a second transparent film arranged on said conductive film, and atranslucent film arranged between said first and second transparentfilms; a wiring terminal part arranged at an edge portion of saidlaminated wiring, said wiring terminal part having a laminated structurebeing the same as at least that of said laminated wiring; and aninsulating film that covers said laminated wiring and at least saidwiring terminal part.
 2. The display according to claim 1, wherein oneof said first and second transparent films placed above the other ishigher in refractive index than said insulating film.
 3. The displayaccording to claim 1, wherein said first transparent film, saidtranslucent film, and said second transparent film are laminated in thisorder on said conductive film.
 4. The display according to claim 3,wherein said first transparent film has an optical path length of from0.09 to 0.14 μm, and said second transparent film has an optical pathlength of from 0.02 to 0.20 μm.
 5. The display according to claim 4,wherein said second transparent film is longer in optical path lengththan said first transparent film.
 6. The display according to claim 1,wherein said first transparent film contains a material selected from:one of a group oxides including indium oxide, zinc oxide, and tin oxide;one of a group of oxides mainly containing any of silicon, aluminum,tantalum, zirconium, yttrium, hafnium, niobium, and titanium; and one ofa group of nitrides mainly containing silicon and aluminum, and saidsecond transparent film contains a material selected from: one of agroup of oxides including indium oxide, zinc oxide, and tin oxide; oneof a group of oxides mainly containing any of aluminum, tantalum,zirconium, yttrium, hafnium, niobium, and titanium; and one of a groupof nitrides mainly containing silicon and aluminum.
 7. The displayaccording to claim 1, wherein said wiring terminal part includes anopening part that penetrates said insulating film and at least one ofsaid first and second transparent films, and said translucent film. 8.The display according to claim 1, wherein said translucent film containsa material selected from Mo, Cr, Ti, Ni, Ta, and W.
 9. A display,comprising: a laminated wiring with a first transparent film arranged ona foundation layer, a translucent film arranged on said firsttransparent film, a second transparent film arranged on said translucentfilm, and a conductive film arranged on said second transparent film; awiring terminal part arranged at an edge portion of said laminatedwiring, said wiring terminal part having a laminated structure being thesame as at least that of said laminated wiring; and an insulating filmthat covers said laminated wiring and at least said wiring terminalpart.
 10. The display according to claim 9, wherein said firsttransparent film has an optical path length of from 0.09 to 0.14 μm, andsaid second transparent film has an optical path length of from 0.02 to0.20 μm.
 11. The display according to claim 10, wherein said secondtransparent film is longer in optical path length than said firsttransparent film.